Electron-probe X-ray microanalysis of thin films

Abstract

The electron-probe x-ray microanalyser is normally used to study surfaces of thick specimens. A method is given here for the microanalysis of thin films. The film thickness is monitored by using the continuous x-ray spectrum. The ratio of the numbers of characteristic quanta to continuum quanta gives a measure of the concentration of an element in the film which is independent of the thickness of the film. The accuracy of the method is approximately 8% M.P.E. for films in the thickness range 0-0·5 mg cm−2.