Abstract
The concept of electron probe micro-analyzer (EPMA) was conceived by Raymond Castaing in the late 1940s, and till today, EPMA remains the most accurate and precise tool for micro-composition analysis in materials, minerals, and geological samples. The purpose of this article is to give a brief introduction to EPMA as applicable for quantitative analysis of composition of a material. The article covers the history, working principles, and basic construction of EPMA in very brief and describes in some details the methodology of quantitative analysis carried out in wavelength dispersive spectroscopy mode by using standards. Various methods used for correcting the raw X-ray intensity data obtained from the spectrometers are explained including ZAF, Phi-Rho-Z, and calibration curve method. In order to illustrate the applications of EPMA in various fields, several case studies are presented in which EPMA was used as a major tool of microanalysis. The case studies cover range of materials including steels, titanium alloys, high-entropy alloys, nickel-based superalloys, and geological materials and minerals.
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