Abstract
A brief overview of the way in which electron-probe microanalysis can be used to obtain information from microvolumes comprising 10−12 g or less of specimen material is presented. Elemental identification, distribution, and quantitative analytical procedures are outlined. Energy-resolving detectors and wavelength-dispersive spectrometers are compared; analysis of elements with atomic number < 11 is also briefly considered in this context. An example of the solution of a service failure by means of elemental-distribution mapping is offered. Finally, an indication is given of the accuracy which can be expected from quantitative electron-probe microanalysis.
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