Abstract

Results from electron paramagnetic resonance (EPR) studies of amorphous hydrogenated carbon (a-C:H) obtained on a quartz substrate under different conditions of deposition E/p (where E is the electric field intensity between the electrodes, and p is the pressure of the gas mix in the capacitive chamber) and temperature of the substrate are presented. Correlations between the EPR line amplitude, spin density, and g-factor, and the optical, electrical, and mechanical properties of a-C:H are found.

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