Abstract
The transition structures made from films formed by evaporating TiO1.28 and TiO1.0 onto NaCl substrates have been studied by electron microscope. The structure of the films formed from TiO1.28 at various substrate temperatures is changed to transition structure I with ordered titanium-vacancy-rich planes by in situ heating in the electron microscope. On the other hand, transition structure II with ordered oxygen-vacancy-rich planes is formed in films made from TiO1.0 in the titanium-rich composition range. The former structure is found to be distorted more from the parent NaCl-type lattice than the latter, and their axial ratios cf'/af' are 0.93 and 0.97, respectively. The difference in the distortion is discussed from the point of view of the difference in the atomic volumes of titanium and oxygen.
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