Abstract
Partial single and double differential cross sections with their sums through direct and dissociative ionization of PF3 have been evaluated at fixed electron energies 100 and 200 eV, by using modified Jain-Khare semi-empirical approach. To the best of my knowledge no other data of differential cross sections are available for the comparison. I have also calculated integral ionization cross sections with their ionization rate coefficients by using M-B distribution. No other data of partial ionization cross section are available till now. The sum/or total of evaluated partial cross sections reveal good agreement with available theoretical data.
Highlights
Electron-molecule collision cross sections from very low energy up to threshold play a pivotal role in determining electron transport properties and electron energy distribution of a swarm of electrons drifting through various gases
Theoretical works based on Binary Encounter Bethe (BEB) and Complex Potential Method (CPM) for total electron ionization cross sections of PF3, both evaluated by M
This letter reports the results of the single differential cross sections (SDCS) as a function of secondary electron energy and double differential cross sections (DDCS) as a function of secondary electron energy and incident angle of electron, by using modified Jain and Khare semi-empirical approach [2]-[8]
Summary
Electron-molecule collision cross sections from very low energy up to threshold play a pivotal role in determining electron transport properties and electron energy distribution of a swarm of electrons drifting through various gases. Theoretical works based on Binary Encounter Bethe (BEB) and Complex Potential Method (CPM) for total electron ionization cross sections of PF3, both evaluated by M. Khare semi-empirical approach is the only formulation that evaluates the energy dependent partial cross sections for molecules in electron ionization. The sum/or total of the partial ionization cross sections (PICS) leading to the formation of various cations PF3+ , PF2+ , PF+, PF32+ , PF22+ , P+, PF2+, F+, and P2+ resulting through the direct and dissociative ionization of PF3 by electron collision show good agreement with the available theoretical data [1]. The results of partial ionization cross sections (PICS) of PF3 molecule were not available till now. Maxwell-Boltzmann energy distribution [9] [10] These results are important in plasma simulations
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