Abstract
Electron-impact cross sections for molecular targets, including their radicals, are important in developing plasma reactors and testing various plasma processing gases. However, we suffer from lack of theoretical and experimental electron-impact cross section data for plasma processing gas, such as plasma etching and deposition processes. Thus, in this work, the total cross sections for electron scattering from plasma processing gases has been developed using magnetized beam formation in the low- and intermediate-energy region.
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