Abstract
SynopsisCobalt tricarbonyl nitrosyl (Co(CO)3NO - CTCN) is a widely used source for cobalt in focused electron-beam induced deposition (FEBID) processes. By doping helium nanodroplets at a temperature of 0.37 K with several Co(CO)3NO molecules we managed to create a multitude of molecular clusters and fragments. These clusters provide a similar environment to the materials used in FEBID. Dissociative electron attachment processes are hence studied in order to provide insight into factors limiting the achievable resolution in FEBID.
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