Electron impact ionization cross-sections for CH3 and SiH3 radical targets

Abstract

Single differential cross sections as a function of secondary electron energy at fixed incident electron energies 100 and 200 eV for the targeted molecule CH3 and SiH3 have been evaluated by using a modified Jain-Khare semi-empirical approach. The integral or total electron-impact ionization cross-sections and the averaged energy loss from differential ionization cross-sections are calculated for incident electron energy from the ionization threshold to the 5 keV regimes. The temperature-dependent ionization rate coefficient is also calculated from total ionization cross-sections and Maxwell-Boltzmann electron energy distribution.The calculated values of total ionization cross sections corresponding to (e, 2e) processes for CH3 and SiH3 molecules are in good accord with available theoretical and experimental results.