Abstract

The 157.6 nm output from a fluorine excimer laser is focused in a vacuum chamber containing O2 gas at a pressure of 20 mTorr. Laser photodissociation of the O2 target gas produces 2p4(3P) and 2p4(1D) oxygen atoms with unit quantum efficiency. A low-energy electron beam is crossed with the laser beam to produce 3p(5P) excited states of OI via electron impact excitation of the 2p4(3P) ground state. Intensity measurements of the 777.4 nm radiation, corresponding to the 3p(5P)–3s(5S) transition, are used to calculate the excitation cross section of the 3p(5P) state of atomic oxygen. Absolute optical cross sections are reported for a range of incident electron energies less than 18 eV.

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