Abstract
Stability of the exciting electron beam is critical in spectrometries such as Auger electron spectrometry when, for example, line‐shaped studies or quantitative analysis is performed. The beam from an electron gun can be stabilized by feedback control referenced directly to the beam current at the operating acceleration potential. This is accomplished by measuring the beam current and providing to the electron gun a voltage proportional to the current in such a manner as to oppose any change in the beam current. A system employing this method has been constructed and tested with an Auger electron spectrometer using a retarding‐grid energy analyzer. A considerable improvement in beam stability was achieved permitting long data acquisition periods necessary to improve signal−to −noise of spectra for Auger analysis. This method of beam control has proven to be superior to conventional systems employing constant grid current or grid voltage regulation.
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