Electron energy loss spectroscopy

Abstract

Ch 1. INTRODUCTION - What is EELS?. Interaction of electrons with matter. Basics of the TEM. Comparison of EELS in TEM with other spectroscopies. Conclusions. References and useful general texts on TEM, EELS and related techniques. Ch 2. THE EEL SPECTRUM - The primary transmitted electron signal. Historical development. Basic components of an EEL spectrum. Basic physics. Summary of analytical uses. References. Ch 3. EELS INSTRUMENTATION AND EXPERIMENTAL ASPECTS - The electron spectrometer. Coupling a magnetic spectrometer to the microscope. Spectral recording. Energy filtered imaging. Choice of experimental conditions for EELS. Specimen parameters. Summary of experimental setup and data. Acquisition procedures for EELS. Summary of data correction procedures for EELS. References and further reading. Ch 4. LOW LOSS SPECTROSCOPY - Quantification of sample thickness. Quantitative aspects of low loss data. Experimental aspects of EELS low loss measurements. Conclusions. References and further reading. Ch 5. ELEMENTAL QUANTIFICATION - Quantification of EEL spectra. Background removal. Determination of the ionization cross-section. Final quantification step. Summary of the quantification procedure. Summary of experimental quantification parameters. Accuracy and detection sensitivity of EELS. Quantification and comparison with EDX in the TEM. References and further reading. Ch 6. FINE STRUCTURE ON INNER SHELL IONIZATION EDGES (ELNES/EXELFS) - Origin of edge fine structure. Determination of co-ordinations. Determination of valencies. Determination of bond lengths. Experimental aspects of ELNES/EXELFS measurements. Conclusions. References and further reading. Ch 7. EELS IMAGING. INTRODUCTION TO EELS IMAGING AND ENERGY FILTERING - Summary of energy-filtering techniques. Procedure for EFTEM elemental mapping. Experimental parameters in EFTEM. Correlation of elemental maps. General strategy for EFTEM elemental analysis. Experimental procedure for EFTEM image acquisition and processing. Comparison of EFTEM and spectrum imaging methods. Energy-filtered tomography. Conclusions. references and further reading. Ch 8. ADVANCED EELS TECHNIQUES IN THE TEM -Orientation dependency in EELS. Spatially resolved measurements. Electron Compton scattering. Reflection mode and surface measurements. References and further reading. Ch 9. CONCLUSIONS - Further reading. Further resources.