Abstract
The spectra of electron energy loss spectroscopy (EELS) can be obtained from inelastically scattered electrons, which primarily come from electron-electron interactions. In EELS, the interaction event to generate the collected signals is the primary process of electron excitation, which results in the incident electron to lose a characteristic amount of energy. The most straightforward application of EELS is the qualitative identification of elements present in samples by the ionization edges appearing in the spectrum. All EELS detectors, regardless of brands, applications and natures of the equipment, share the common structure of a magnetic prism spectrometer that makes the detection of electrons with different energies possible. The main EELS technique historically used for the study of reaction mechanisms has been high-resolution EELS (HREELS). The combination of environmental transmission electron microscope (ETEM) and monochromated EELS has potential to study vibrational spectroscopy with a spatial resolution in the order of nanometers or even sub-nanometer. Keywords: electron energy loss spectroscopy; environmental transmission electron microscope; inelastic scattering; magnetic prism spectrometer; vibrational spectroscopy
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