Electron-energy-loss spectra of the Si(100)-(2 x 1) surface exposed to NH3.

Abstract

High-resolution vibrational electron-energy-loss spectroscopy has been used to study the interaction of ${\mathrm{NH}}_{3}$ with the Si(100)-(2\ifmmode\times\else\texttimes\fi{}1) surface. ${\mathrm{NH}}_{3}$ is decomposed on the Si(100) surface at 300 K to form the ${\mathrm{SiNH}}_{2}$ and SiH species. It is proposed that the amino (${\mathrm{NH}}_{2}$) species is bonded to the dangling bond of the Si(100) surface atom. Changes in the adsorbed state of both species under heat treatment are discussed.