Abstract

The Druyvesteyn method of measuring electron energy distributions in low pressure plasmas has been applied to cold-cathode direct current glow discharges in oxygen and nitrogen at pressures in the range 0.010 to 0.050 mm Hg. Two discharge modes occurred in both gases. Mass spectrometer measurements showed that in nitrogen only N 2 + was present but in oxygen the ions O - , O 2 - , O + , O 2 + , were all present. O - and O 2 + concentrations were about equal in magnitude and formed over 90 % of the ions present. Electron energy distributions in the positive column showed three groups in oxygen and nitrogen. The data available from the oxygen discharge are consistent with the lowest energy peak being a manifestation of a large negative ion concentration ( n - / n e = 20).

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