Abstract
AbstractElectron energy distribution functions in molecular rf plasmas (CO, SF6) have been calculated by numerically solving the time dependent Boltzmann equation in a wide range of field frequencies up to the establishment of the periodic state.Particular attention is given to the reduction of the modulation degree and phase shift with respect to the rf field of the isotropic distribution function and of some macroscopic quantities as a function of frequency.Time averages of distribution functions and of some macroscopic quantities are then compared with the corresponding results obtained by using the effective field approximation.Finally we discuss the role of the second kind collisions in affecting the results.
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