Abstract
The electron energy distribution function (EEDF) is measured with a Langmuir probe in a symmetrically driven capacitively coupled rf argon discharge. The distortion of the probe current-voltage characteristics by rf plasma potential fluctuation, which is suppressed by electric circuit resonance among an inductance, the electrode-plasma sheath and the plasma-ground stray capacitances, is finally eliminated by applying the remaining fluctuation to the probe. The detected EEDF differs from the theoretical one obtained from the Boltzmann equation.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
