Abstract
A new, comprehensive kinetic model has been used to calculate the time-dependent behavior of electron number density in electron-beam-pumped XeCl excimer laser gas mixtures. Predictions of the model are compared to recently published experimental results and are shown to be in good agreement for moderate and high HCl concentrations (≥0.12%). At low HCl concentration a clear discrepancy is apparent, one which cannot be explained by assuming any reasonable electron energy distribution.
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