Abstract
Plasmas are produced by electron cyclotron resonance (ECR) discharge of a mixture of hydrogen and sublimation gas of decaborane B10H14 in its solid state. Emissions from boron atoms B and boron hydride BH in the plasmas are measured spectroscopically. Hydrogenated boron films are prepared using the ECR plasmas. The hydrogen concentration in the boron films is about 2% at the substrate temperature T s of 300°C. Apparent activation energy of the growth reactions of the boron films is estimated to be about -0.06 eV.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
