Abstract
Plasmas are produced by electron cyclotron resonance (ECR) discharge of a mixture of hydrogen and sublimation gas of decaborane B10H14 in its solid state. Emissions from boron atoms B and boron hydride BH in the plasmas are measured spectroscopically. Hydrogenated boron films are prepared using the ECR plasmas. The hydrogen concentration in the boron films is about 2% at the substrate temperature T s of 300°C. Apparent activation energy of the growth reactions of the boron films is estimated to be about -0.06 eV.
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