Abstract
AbstractThe paper deals with electron kinetics of a Ar/SiH4 dc plasma, using the stationary and spatially uniform Boltzmann equation. The solution of this kinetic equation has been obtained by applying higher order Legendre polynomial expansion of the electron velocity distribution. For varying mixture composition the energy distribution and relevant macroscopic quantities as mean energy, drift velocity, rate coefficients for excitation, dissociation and ionization and relevant energy transfer rates for these processes have been calculated. In particular, it has been found that a most effective activation of the feed gas occurs for SiH4 admixtures in the range from 5 to 10 per cents.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
