Electron Collision Cross Sections for the Tetraethoxysilane Molecule and Electron Transport Coefficients in Tetraethoxysilane–O2 and Tetraethoxysilane–Ar Mixtures

Abstract

A consistent set of low energy electron collision cross sections for tetraethoxysilane (TEOS) molecule has been derived from the measured electron transport coefficients (electron drift velocity W , density-normalized longitudinal diffusion coefficient ND L , ratio of the longitudinal diffusion coefficient to the electron mobility D L /µ, and Townsend first ionization coefficient α/ N ) in pure TEOS molecule and those calculated by using an electron swarm study and a two-term approximation of the Boltzmann equation for energy. The electron transport coefficients calculated using the derived set are consistent with the experimental data over a wide range of E / N values (ratio of the electric field E to the neutral number density N ). The present set of electron collision cross sections for the TEOS molecule, therefore, is the best available so far for quantitative numerical modeling plasma discharges for processing procedures with materials containing TEOS molecules. Electron transport coefficients in TEO...