Abstract

We describe the development of a consistent set of low-energy electron-collision cross sections for tetraethoxysilane, also known as tetraethylorthosilicate. Ab initio calculations are used to obtain the elastic and momentum-transfer cross sections. These are combined with measured values of the ionization cross section and with model vibrational and electronic excitation cross sections to form a preliminary cross section set, which is then adjusted to achieve consistency with measured swarm parameters.

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