Abstract
An electron beam testing system has been developed, consisting of a new type of electron beam blanking system and a specimen holder designed for applying GHz-frequencies to the device under test. First quantitative measurements have been done on a special test structure, showing the influence of the transit-time-effect on quantitative measurements. These experimental results were compared with results obtained by simulations, showing good agreement. Although the electron beam testing system works in a frequency range from 8 to 18 GHz the results show that quantitative measurements are only practical for frequencies below 2.5 GHz, assuming a maximum measurement error of 10%.
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