Electron beam recording of microdomains on the nonpolar LiNbO3 crystal surface at different SEM accelerating voltages

Abstract

The effect of the accelerating voltage U of the SEM electron beam on the characteristics of microdomains recorded by the electron beam method on the nonpolar Y-surface of LiNbO3 crystals has been studied. The thickness Td of domains in the Y direction is determined by the depth range Re of primary electrons, which depends on U. This makes it possible to define Td in the range of 0.2–4 μm at U = 5–25 kV, respectively. The electron emission coefficient σ is estimated for different values of U exceeding the second equilibrium point U2 (σ = 1) in the σ(U) diagram. These data are used to construct the dependence σ(U) for LiNbO3. Based on the exposure characteristics of the length Ld of domains growing along the polar Z axis, the dependence of the space charge field controlling the domain planar growth along Z on the surface electron emission σ is found.