Abstract
Damaging processes of an electron beam to α-alumina (0,1̄,1) surfaces are investigated using the combined techniques of reflection electron microscopy (REM), scanning reflection electron microscopy (SREM), reflection electron energy-loss spectroscopy (REELS) and secondary electron imaging (SEI). It is shown that the surface domains terminated with oxygen layers are rapidly damaged and appear with dark contrast in REM images. These domains later turn back to bright contrast after the top oxygen layer is removed. The surface domains terminated with aluminium layers are almost undamaged and appear with bright contrast in REM images. The relationship between the surface layer structure and its damaging rate is described. Reflection energy loss valence spectra are not much influenced by the nature of the atomic termination or the damage process. Termination effects can however be observed in the secondary electron signal although the explanation for this is not clear.
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