Abstract
An electron beam is used as a source of energy directly on green Al2O3 to form patterns of holes and channels for subsequent conductive filling. Holes of 0.003 to 0.006 in. diam, and channels of 0.001 to 0.006 in. width and controlled depth were formed in 0.008 in. thick green A12O3 sheets. A channel forming speed of 200 in. per sec was achieved. The mechanism of material removal is discussed. This process is capable of high density interconnection structures needed for high performance module fabrication, and it is adaptable to automation.
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