Abstract
Michelson interferometry (MI), scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDS), and Auger electron spectroscopy have been combined to study the deformation and wear behavior of sputter deposited MoS 2 coatings. MI combined with EDS were shown to distinguish deformation from wear. EDS combined with Auger sputter depth profiling were especially valuable for identifying reaction products (e.g. oxides of Mo and Fe) of the wear process. EDS data were quantified using a procedure that accounts for the severe overlap of the Mo(Lα)+S(Kα) spectra. The sensitivity of quantitative EDS to thickness changes in fully dense MoS 2 was determined to be 30 nm.
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