Electron beam induced deposition of rhodium from the precursor [RhCl(PF 3) 2] 2: morphology, structure and chemical composition

Abstract

We have studied the morphology, the structure and the chemical composition of micro- and nano-structures grown by electron beam-induced deposition of [RhCl(PF 3) 2] 2. Transmission electron microscopy revealed that the deposits are made up of face centered cubic crystalline Rh grains (4–6 nm in diameter) immersed in an amorphous matrix. Auger electron spectroscopy and electron energy loss spectroscopy showed that a carbon contamination layer is present at the deposit surface, while the bulk material contains the elements Rh (60 at%), P (20 at%), Cl, O and N (remaining 20 at%). The structure, the chemical composition of the deposits and the size of the Rh nano-crystals are independent of the deposit shape and of the deposition parameters, within the range explored in this work.