Abstract
The interaction of a 2.5 keV electron beam with MBE-grown CaF 2layers on Si(111) was studied by AES at ambient temperature. The desorption of fluorine is induced by electron bombardment of the films under UHV conditions, leaving behind metallic Ca, which in the presence of oxygen in turn is oxidized to CaO. The kinetics of the reaction is described in terms of a three-step-model involving CaF 2 decomposition, yield of metallic Ca, and a following oxidation. As concluded from the pressure dependence of the reaction rate, the latter is determined by an equilibrium between gaseous and adsorbed oxygen. Auger electron spectroscopy reveals slight differences in the calcium Auger peak in irradiated and oxidized CaF 2 which is attributed to their distinctive electronic structures.
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