Abstract
In this work we examine the opportunity to combine the advantages of two well- known experimental techniques – ellipsometry and scanning electron microscopy (SEM). Ellipsometry has very high sensitivity in the direction normal to the sample's surface while the lateral resolution is limited by the width of the probe beam, while the scanning electron microscopy has better lateral, but limited in-depth resolution. The electron beam can induce local changes in the electron density and the temperature of the sample, which alters the reflectance coefficient and can be potentially detected by optical methods and ellipsometry in particular.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
