Abstract
Thin films of transition metal oxides are very important in electrochromic applications. Molybdenumoxide (MoO3) thin films were prepared by using one of the physical vapour depositionsof the electron beam evaporation technique in a vacuum of the order of10−6 mbar. The detailed elemental analysis of the films was performed by a particle-inducedx-ray emission (PIXE) study and the nanosurface nature of the films was studied by usingan atomic force microscopy (AFM) analysis. To the best of our knowledge this is the firsttime PIXE analysis has been used for the elemental studies of electron beam evaporatedMoO3 films.
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