Electron backscatter diffraction in materials characterization

Abstract

Electron Back-Scatter Diffraction (EBSD) is a powerful technique that captures electron diffraction patterns from crystals, constituents of material. Captured patterns can then be used to determine grain morphology, crystallographic orientation and chemistry of present phases, which provide complete characterization of microstructure and strong correlation to both properties and performance of materials. Key milestones related to technological developments of EBSD technique have been outlined along with possible applications using modern EBSD system. Principles of crystal diffraction with description of crystallographic orientation, orientation determination and phase identification have been described. Image quality, resolution and speed, and system calibration have also been discussed. Sample preparation methods were reviewed and EBSD application in conjunction with other characterization techniques on a variety of materials has been presented for several case studies. In summary, an outlook for EBSD technique was provided.