Abstract
1-3 type PZT5H/epoxy composites were fabricated via dice and fill method, by which the PZT5H ceramic blocks were processed into a series of rod arrays with kerf width of 120 μm ∼ 260 μm and pillar width of 120 μm ∼ 450 μm. Proper thickness was chosen to guarantee that the aspect ratio (height/width) is higher than 3. Piezoelectric properties of the 1-3 composites as a function of ceramic volume fraction and aspect ratio were investigated. The resultant composites show high piezoelectric coefficient d33>500p C/N, low mechanical quality factor Qm = 2.9 ∼ 7.7, enhanced electromechanical coupling coefficient kt=0.66∼0.74 and low acoustic impedance Z = 9 ∼ 17 Mrayl, as well as a good temperature stability in the investigated temperature range from -50°C to 150°C.
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