Electromechanical Modeling of MEMS-Based Piezoelectric Energy Harvesting Devices for Applications in Domestic Washing Machines

Abstract

Microelectromechanical system (MEMS)-based piezoelectric energy harvesting (PEH) devices can convert the mechanical vibrations of their surrounding environment into electrical energy for low-power sensors. This electrical energy is amplified when the operation resonant frequency of the PEH device matches with the vibration frequency of its surrounding environment. We present the electromechanical modeling of two MEMS-based PEH devices to transform the mechanical vibrations of domestic washing machines into electrical energy. These devices have resonant structures with a T shape, which are formed by an array of multilayer beams and a ultraviolet (UV)-resin seismic mass. The first layer is a substrate of polyethylene terephthalate (PET), the second and fourth layers are Al and Pt electrodes, and the third layer is piezoelectric material. Two different types of piezoelectric materials (ZnO and PZT-5A) are considered in the designs of PEH devices. The mechanical behavior of each PEH device is obtained using analytical models based on the Rayleigh–Ritz and Macaulay methods, as well as the Euler–Bernoulli beam theory. In addition, finite element method (FEM) models are developed to predict the electromechanical response of the PEH devices. The results of the mechanical behavior of these devices obtained with the analytical models agree well with those of the FEM models. The PEH devices of ZnO and PZT-5A can generate up to 1.97 and 1.35 µW with voltages of 545.32 and 45.10 mV, and load resistances of 151.12 and 1.5 kΩ, respectively. These PEH devices could supply power to internet of things (IoT) sensors of domestic washing machines.