Abstract
This paper presents the concept, theory, and demonstration of electromechanical devices that employ energy conversion and mechanical energy storage in order to boost the apparent one-port electrical inductance. Two different structures – moving-magnet and moving-conductor – are used to demonstrate the concept. An electromechanical lumped element model is derived that both explains the physics and guides the design. Measurements of mesoscale proof-of-concept devices indicate an inductance boost of up to three orders of magnitude compared to static electrical devices, with maximum inductive quality factor up to 7.4. These structures are presented as a first step toward ultra-high-inductance-density microfabricated “electromechanical inductors” ultimately intended for power converter applications.
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