Abstract
The electromechanical coupling, elastic properties, and temperature coefficient of elastic constant c33D of ScxAl(1−x)N films with high Sc concentration (x) of 0–0.70 were experimentally investigated. Near the phase boundary, a Sc0.41Al0.59N film exhibited a maximum thickness extensional mode electromechanical coupling coefficient kt2 of 12% (kt = 0.35), which is almost double the value of 6.4% for typical pure AlN films. In the region of 0 < x < 0.2, the electromechanical coupling was confirmed to increase without any detectable deterioration in the temperature stability of c33D (=−54.5 ppm/ °C). This region is favorable in terms of temperature stability and is suitable for wideband resonator filter applications.
Highlights
The electromechanical coupling, elastic properties, and temperature coefficient of elastic constant cD33 of ScxAl(1Àx)N films with high Sc concentration (x) of 0–0.70 were experimentally investigated
This region is favorable in terms of temperature stability and is suitable for wideband resonator filter applications
AlN film bulk acoustic wave (BAW) resonator filters are promising for application for mobile communication applications that operate at over 5 GHz
Summary
The electromechanical coupling, elastic properties, and temperature coefficient of elastic constant cD33 of ScxAl(1Àx)N films with high Sc concentration (x) of 0–0.70 were experimentally investigated. It is important to be able to predict the physical properties near the phase boundary that appear near the high Sc concentration (x) of 0.5.8,12 Wingqvist et al theoretically predicted the electromechanical coupling of 30%-Sc-concentration (x < 0.3) films from the experimental dielectric constant e33, the theoretical piezoelectric constant e33, and the elastic constant c33.13 a)Electronic mail: yana@nitech.ac.jp
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