Abstract

In this work, a novel dielectric metasurface consisting of square slotted arrays etched in a silicon layer is proposed and theoretically demonstrated. The structure is designed to support electromagnetically induced transparency (EIT) based on quasi-bound states in the continuum (qBIC). Specifically, the metasurface consists of square slots with a silicon gap that breaks the symmetry of the structure. Thanks to the interaction of the sharp quasi-BIC resonances with a broadband background mode, an extremely high <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\mathbf{Q}$</tex> factor EIT response of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\boldsymbol{6\cdot 10^{6}}$</tex> is demonstrated (considering the length scales feasible during fabrication and optical losses). Moreover, the resonator possesses a simple bulk geometry and subwavelength dimensions. The proposed metasurface, its high <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\mathbf{Q}$</tex> factors, and strong energy confinement may open new avenues of research on light-matter interactions in emerging applications in non-linear devices, lasing, biological sensors, optical communications, etc.

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