Electromagnetically-Actuated Reciprocating Pump for High-Flow-Rate Microfluidic Applications

Ming-Tsun Ke,Chia-Yen Lee,Jian-Hao Zhong

doi:10.3390/s121013075

Ming-Tsun Ke, Chia-Yen Lee + Show 1 more

Open Access

https://doi.org/10.3390/s121013075

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Abstract

This study presents an electromagnetically-actuated reciprocating pump for high-flow-rate microfluidic applications. The pump comprises four major components, namely a lower glass plate containing a copper microcoil, a middle PMMA plate incorporating a PDMS diaphragm with a surface-mounted magnet, upper PMMA channel plates, and a ball-type check valve located at the channel inlet. When an AC current is passed through the microcoil, an alternating electromagnetic force is established between the coil and the magnet. The resulting bi-directional deflection of the PDMS diaphragm causes the check-valve to open and close; thereby creating a pumping effect. The experimental results show that a coil input current of 0.4 A generates an electromagnetic force of 47 mN and a diaphragm deflection of 108 μm. Given an actuating voltage of 3 V and a driving frequency of 15 Hz, the flow rate is found to be 13.2 mL/min under zero head pressure conditions.

Highlights

Rapid advances in micro-electro-mechanical systems (MEMS) techniques over the past few decades have led to the development of many microfluidic devices for use in the chemical, biological and environmental monitoring fields
Dau et al [15] proposed a MEMS-based peristaltic micropump in which the diaphragm was deflected by three piezoelectric lead zirconate titanate (PZT) actuators driven at a frequency of 7.9 kHz
The experimental results have shown that the actuator mechanism provides a large diaphragm deflection, a high magnetic field energy density, and a low power consumption

Summary

Introduction

Rapid advances in micro-electro-mechanical systems (MEMS) techniques over the past few decades have led to the development of many microfluidic devices for use in the chemical, biological and environmental monitoring fields These devices are designed to perform specific functions such as sample manipulation, reaction, separation and detection, and so on. Fluid was driven through the pump by passing an alternating current through the microcoil; thereby creating an electromagnetic force between the coil and the magnet and inducing a periodic deflection of the PDMS diaphragm. 200 Hz. Dau et al [15] proposed a MEMS-based peristaltic micropump in which the diaphragm was deflected by three piezoelectric lead zirconate titanate (PZT) actuators driven at a frequency of 7.9 kHz. The large-scale displacements of the diaphragm resulted in a significant driving pressure (280 Pa) and a substantial net flow (i.e., 5.2 mL/min). It is shown that a maximum flow rate of 13.2 mL/min can be achieved using an actuating current of 0.4 A, an actuating voltage of 3 V, and a driving frequency of 15 Hz

Micropump Design

Fabrication

Microcoil Stack

Results and Discussion

Conclusions