Abstract
In this paper, we present the design, fabrication, and measurement results of a two-dimensional electromagnetic scanning micromirror actuated by radial magnetic field. The scanner is realized by combining a gimbaled single-crystal-silicon micromirror with a single turn electroplated metal coil, with a concentric permanent magnet assembly composed of two concentric permanent magnets and an iron yoke. The proposed scanner utilizes the radial magnetic field rather than using a lateral magnetic field oriented 45° to the horizontal and vertical scan axes to achieve a biaxial magnetic actuation. The single turn coil fabricated with electroplated copper achieves a nominal resistance of 1.2Ω. A two-dimensional scanner with mirror size of 1.5mm in diameter was fabricated. Maximum optical scan angle of 8.8° in horizontal direction and 8.3° in vertical direction were achieved. Forced actuation of the gimbal at 60 Hz and resonant actuation of the micromirror at 19.1-19.7kHz provide slow vertical scan and fast horizontal scan, respectively. The proposed scanner can be used in raster scanning laser display systems and other scanner applications.
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