Electromagnetic simulation of helicon plasma antennas for their electrostatic shield design

Abstract

A detailed electromagnetic parametric analysis of the helicon antenna (half Nagoya type) is shown at 13.56 MHz using a CST Microwave Studio 2012. The antenna is used to excite plasma inside a dielectric cylinder similar to a commercial reactor. Instead of focusing on the plasma state, the authors focus on the penetration and the three dimensional distribution of electric fields through the dielectric wall. Our aim is to reduce capacitive coupling which produces unwanted longitudinal and radial electric fields. Comparison of the helicon antenna electromagnetic performance under diverse boundary conditions shows that one is allowed to use vacuum simulations without plasma present in the cylinder, or approximate the plasma as a column of gyrotropic material with a tensor dielectric permittivity and with a sheath of a few millimeters in order to qualitatively predict the electric field distribution, thus avoiding a full plasma simulation. This way the analysis of the full problem is much faster and allows an optimal shield design. A detailed study of various shields shows that one can reduce the radial and axial fields by more than 1 order of magnitude compared to the unshielded antenna, while the azimuthal field is reduced only by a factor of 2. Optimal shield design in terms of pitch and spacing of openings is determined. Finally, an experimental proof of concept of the effect of shielding on reduced wall sputtering is provided, by monitoring the roughness created during oxygen plasma etching of an organic polymer.