Electromagnetic metamaterials over the whole THz range – achievements and perspectives

Abstract

Using modern micro and nanofabrication techniques, the manufacturing of electromagnetic metamaterials (EM) with structure sizes < 100 μm and critical dimensions < 100 nm has become possible. At this size scale, the resonance frequencies of the structures lie in the THz spectral range. We give an overview of the achievements in and the potential of this field, and discuss new developments towards the micro/nanofabrication of EM with nanoscale dimensions and achievable resonance frequencies accordingly higher in the THz range. We then address ways to produce 3D EM which derive from stacking, eventually combined with tilted and rotated exposure during X-ray lithography. Finally, we address “foundry” services offered by the LiMiNT facility at SSLS (Lithography for Micro/Nanotechnology) to customers seeking to have their own micro/nanoscale EM manufactured.