Abstract
In this paper, we describe a flat-type vertical-gap passive magnetic levitation vibration isolator (FVPMLVI) for active vibration isolation system (AVIS). A dual-stator scheme and a special stator magnet array are adopted in the proposed FVPMLVI, which has the effect of decreasing its natural frequency, and this enhances the vibration isolation capability of the FVPMLVI. The structure, operating principle, analytical model, and electromagnetic and mechanical characteristics of the FVPMLVI are investigated. The relationship between the force characteristics (levitation force, horizontal force, force ripple, and force density) and major structural parameters (width and thickness of stator and mover magnets) is analyzed by finite element method. The experiment result is in good agreement with the theoretical analysis.
Highlights
Active vibration isolation system (AVIS), which integrates actuators with passive gravity compensation devices, can effectively improve the accuracy of measuring and machining equipment
Owing to the advantage of low natural frequency, air springs are widely adopted as passive gravity compensation devices in many active vibration isolation systems
Through adopting the dual-stator structure and inserting horizontally magnetized magnets, the flat-type vertical-gap passive magnetic levitation vibration isolator can generate nearconstant levitation force and near-zero stiffness in six-degree of freedom stroke, which is useful for improving the vibration isolation performance of active vibration isolation system
Summary
Active vibration isolation system (AVIS), which integrates actuators with passive gravity compensation devices, can effectively improve the accuracy of measuring and machining equipment. Owing to the advantage of low natural frequency, air springs are widely adopted as passive gravity compensation devices in many active vibration isolation systems. Zhu et al proposed a passive magnetic levitation vibration isolator composed of ring-shaped permanent magnets; they studied its axial force and stiffness characteristics, and its natural frequency is about 6 Hz [3]. Zheng et al designed a vibration isolator composed of ring-shaped magnets and a coil spring; its natural frequency is reduced from 9.0 Hz to 5.8 Hz [14]. We propose a flat-type vertical-gap passive magnetic levitation vibration isolator (FVPMLVI) that features vacuum compatibility, low natural frequency, and no mechanical contact.
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