Abstract
Lorentz-force-driven planar motor, which consists of three linear Lorentz motors in such an integrated configuration, can achieve high-speed and high-precision motion with nanometer positioning accuracy. The stator and mover of the Lorentz planar motor are coupled by electromagnetic forces without mechanical contact. Owing to end effect, magnetic leakage field, magnetic field coupling and material non-linear, magnetic field distribution in airgap is non-uniform. In this paper, 3-D electromagnetic finite element model of the Lorentz-force-driven planar motor is established in order to achieve more precise simulation results. The magnetic field distribution in airgap and the relations of currents, displacements and Lorentz forces are obtained by Maxwell equations and virtual work principle. These simulation results are in agreement with those of the experiments, which presents the FE model and simulation results are reasonable and feasible. It is helpful to structural optimization and control design of ultra-precision drive machine in next work.
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