Abstract
We investigated an electroless aluminum plating based on using AlCl 3–1-ethyl-3-methylimidazolium chloride (AlCl 3–EMIC) ionic liquid with diisobutyl aluminum hydride (DIBAH) as a liquid reducing agent. The plating film was analyzed by measurements of X-ray diffraction, scanning electron microscopy with energy-dispersive X-ray analysis (SEM-EDX) and glow discharge optical emission spectroscopy (GD-OES). Consequently, a thick aluminum plating film with high uniformity was prepared from AlCl 3–EMIC with DIBAH. No impurity phases were detected. Moreover, we discussed the reaction mechanism of the electroless aluminum plating.
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