Electroless Metallization of Silicon Using Metal Nanoparticles as Catalysts and Binding-Points

Abstract

Gold nanoparticles on silicon work not only as catalysts to initiateautocatalytic electroless metal deposition but also as bindingpointsbetween the deposited metal film and the silicon surface.Conventional catalysts of autocatalytic electroless metal deposition,such as palladium and silver, require heat treatments or anchorformation to obtain practical adhesion of deposited metal films onsilicon. Gold nanoparticles can directly produce adhesive metalfilms on flat silicon surfaces without any treatments. Crosssectionaltransmission electron microscopic observation revealsthat gold nanoparticles form an alloy with silicon at the roomtemperature. This alloy is expected to improve the adhesion ofmetal film on silicon.