Abstract
The influence of the voltage polarity and also the thickness and material of the upper electrode on the electroforming and breakdown of a thin-film MIM system has been investigated. It is shown that the processes in the insulator in the breakdown and forming have the same nature. On the basis of the experimental results it is concluded that the main factors which distinguish the forming from the breakdown are the magnitude of the energy deposition on the formation of a discharge channel in the insulator and the nature of the gas release from the discharge channel. These determine the geometrical sizes and morphology of the defects formed in the MIM system under the influence of the voltage and are in the one case formed channels and in the other breakdown channels.
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