Abstract
In the present work the structural-parametric model of the piezoactuator is determined in contrast electrical equivalent circuit types Cady or Mason for the calculation of the piezoelectric transmitter and receiver, the vibration piezoactuator and the vibration piezomotor with the mechanical parameters in form the velosity and the pressure. The aim of this work is to obtain the structural-parametric model of the electroelastic actuator with the mechanical parameters the displacement and the force. The method of mathematical physics is used. Structural scheme of electroelastic actuator for nanotechnology is obtained. The transfer functions of the actuators are determined. For calculations control systems for nanotechnology with piezoactuator the structural scheme and the transfer functions of piezoactuator are obtained. The generalized structural-parametric model, the generalized structural scheme, the generalized matrix equation for the electroelastic actuator nano- and microdisplacement are obtained in the matrix form. The deformations of the electroelastic actuator for the precision mechanics are described by the matrix equation.
Highlights
The electroelastic actuator based on the electroelasticity in the form the piezoelectric, piezomagnetic, electrostriction effects is used for the precision mechanics in the nanotechnology, the nanobiology, the microelectronics, the astronomy and the adaptive optics
We obtain the structural scheme of the electroelastic actuator nano- and microdisplacement for the precision mechanics
The structural scheme and the transfer functions of the piezoactuator are obtained from structural parametric model of the piezoactuator for the precision mechanics
Summary
The electroelastic actuator based on the electroelasticity in the form the piezoelectric, piezomagnetic, electrostriction effects is used for the precision mechanics in the nanotechnology, the nanobiology, the microelectronics, the astronomy and the adaptive optics. This actuator are solved problems of the compensation of the temperature and gravity deformations, the correction of the wave front and the precision alignment [1 − 10]. Piezoactuator nano- and microdisplacement for the precision mechanics provide the movement range from several nanometers to tens of microns, the sensitivity of up to 1 nm/V, the loading capacity of up to 1000 N. Piezoactuator nano- and microdisplacement is used in the majority of the scanning tunneling microscopes, the scanning force microscopes, the atomic force microscopes [1 − 20]
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