Abstract

An electrodynamic theory is constructed for a shielded model of coupled identical dielectric fin lines for use in EHF three-dimensional integrated circuits (TDIC) as transmission lines or as a foundation for the EHF TDIC component base. The analysis is based on a system of integral equations, whose algebraization is performed by the Budnov-Galerkin method. The desired fields are represented in the form of expansions in Chebyshev polynomials of the first and second kind, which allows the characteristics of the electromagnetic field near the fins of the examined transmission line to be taken into account directly. The system of linear algebraic equations is reduced in the course of a numerical experiment. Data on the two main (even and odd) waves and a few higher modes are obtained. Approximate results obtained earlier are evaluated (by the transverse-resonance method, expansion in an incomplete system, etc.).

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