Abstract
This Letter is on wide-bandwidth electrodes suitable for ultralow voltage substrate-removed compound semiconductor electro-optic modulators. Using a loaded line approach, traveling wave electrodes suitable for wide-bandwidth and low-voltage operation were studied theoretically and experimentally up to 35 GHz. Using staircase waveguides and n-i-p-i-n epilayer designs, electrode capacitance and resistance were reduced significantly. Experimental and modeling results are found to agree very well. Theoretical and experimental results indicate that subvolt modulators with electrical to optical bandwidths in excess of 30 GHz are possible.
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