Electrodeposition of antimony telluride thin films from acidic nitrate-tartrate baths

Abstract

Electrochemical quartz crystal microbalance (EQCM) and rotating disk electrode (RDE) techniques were utilized to systematically investigate the electrodeposition of Sb x Te 1− x (0.1 < x < 0.8). In addition, the effect of applied potential and agitation were correlated to the film composition, crystal structure, and morphology. Although the film composition was independent of the agitation rate, the deposition rate, current efficiency, crystallinity and phase of Sb x Te 1− x were all strongly influenced by it. The deposition rate monotonically increased with increases in the rotation rate because of the faster diffusion rate of HTeO 2 + ions to the cathode. Amorphous thin films were electrodeposited in the absence of agitation, whereas polycrystalline Sb 2Te 3 with elemental Sb and Te were co-deposited at a higher agitation independent of the applied deposition potential.